Nanoelectronic biosensor modeling, design and characterization
Submitted by Paolo Scarbolo on Sat, 07/06/2014 - 17:37
Field Effect Transistor (FET)-based biosensors are investigated as pH-meters or high sensitivity detectors of specific targets such as DNA strands, proteins and viruses. The sensor operates as a standard FET where the gate terminal is replaced with a liquid electrolyte solution. The chemical reactions and the specific binding at the gate-oxide/liquid interface modulate the surface potential, thus affecting the FET conductivity and generating an electrically measurable signal. We present a systematic study of the pH sensitivity of ISFET biosensors based on Silicon Nanoribbon (SiNR) fabricated with a top-down approach. Measurements in dry and wet conditions are compared to TCAD simulations; the impact of the channel doping, bias point and device dimensions are analyzed in details.
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